A co-evaporation technique was used for depositing an Al-Er thin film combinatorial library on borosilicate glass substrates with Er concentrations between 3 and 21 at.% and a total compositional resolution of 0.25 at.% mm1. Scanning droplet cell microscopy was employed for compositional mapping of several fundamental properties of mixed oxides grown on Al-Er thin film alloys. Microstructural and crystallographic particularities of Al-Er alloys were identified along the library, and a relevant compositional threshold at around Al-5 at.% Er was identified. Further, small surface grains in the nanometre range were found at Al grain boundaries, and an initial amorphization and/or hexagonal phase nucleation was identified for Er amounts around 5 at.%. Electrochemical studies revealed the importance of this compositional threshold, as distinct maximizations of oxide formation factors and oxide electrical permittivities were observed.